matsusada松定电源维修高压发生器维修amt-5b20-l gp-met2-9
应用对象包括：刻蚀、rie、pecvd、icp、射频溅射、cvd和pvd等系统，也可作为工厂业系统中感应加热和电介质加热设备的电源
clx系列低频电源、clf系列低频电源、cx系列高频电源、cx5k和cx10k高频射频功率源、cxh系列高功率/高频电源、cps系列高频电源、cb系列高频射频电源、cv系列甚频（vhf）电源、cdx系列双频电源、xdc1000直流电源、match自动调谐网络、esc系列静电夹盘电源cdx 1000 - p/n fp5201r1/cdx 2000 - p/n fp5315rf/cdx 2000 - p/n fp5318r2/cdx 2000 - p/n fp5319r2/cdx 2000 - p/n fp5320r3/clf 500 - p/n fp1254r2/clf 1000 - p/n fp1252r2/clf 5000 - p/n fp1541rc/clx 600 - p/n fp1245r1/clx 2500 - p/n fp1333r2/clx 2500 - p/n fp1335r2/clx 2500 - p/n fp1335r4/clx 2500 - p/n fp1336r3/cps 500 - p/n fp0112rf/cps 500as - p/n fp0113rk/cps 1000 - p/n fp0213rk/cps 1001 - p/n fp0213rj/cx 650 - p/n fp3116r3/cx1250s - p/n fp3212rb/cx 1250s - p/n fp3212rc/aga-27 60mhz 2,7kw - p/n/aga-27a3/eni / mks/dpgs-10 - dc / rf generator - p/n dpgs-10-04/dpgs-10 - dc / rf generator - p/n dpgs-10-05/dpgd-10 - dc /rf generator - p/n dpgd-10-04/dpgd-10 - dc /rf generator - p/n dpgd-10-05
